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ICFO · NanoFabrication Laboratory


The NanoFabrication Laboratory (NFL) is a cross-disciplinary facility devoted to the fabrication and characterization of nanostructured photonic devices. The facility, which is open to users both within and outside ICFO, includes state-of-the-art nanofabrication tools and techniques for a wide range of optical applications, ranging from biosensing to optical communications. The NFL allows researchers to use a broad range of materials, including polymers, semiconductors, metals, and crystals, among many others. This laboratory also provides tools for advanced material and device characterization.

Partner: ICFO

Facility Coordinator:  This e-mail address is being protected from spambots. You need JavaScript enabled to view it

Website: www.icfo.eu

Available Resources

  • Lithography: electron-beam, focused-ion beam and optical lithography
  • Etching: ICP, RIE and wet etching
  • Thin film deposition: thermal and electron-beam evaporation, sputtering, atomic layer deposition
  • Surface preparation: plasma asher, UVO cleaner, ovens
  • Characterization: SEM, EDX, atomic force microscopy, spectroscopic ellipsometry, SNOM, profilometry, microscopy, etc.
  • Specific controlled environment: glove boxes, fume hoods, laminar flows, etc.

The NFL is open to external collaborations with industry, research centers and Universities. In particular, the NPL has a formal collaboration agreement with the CRnE of the Universitat Politècnica de Catalunya. We are active hosts to Pan-European Research Infrastructures.

ICFO NFL

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